italian version

Aims :

The instructive target of the course is to supply an exhaustive picture of the materials and the technologies used in electronic devices processing and manufacturing, in order to make students aware of related issues.

Topics :

The structure of matter: crystal structure and amorphous state, defects and impurities, non-equilibrium processes. Diffusion: diffusion in solids, diffusion junctions. Crystal growing. Wafer processing. Epitaxy: vapor-phase and molecular beam epitaxy. Oxidation: techniques, oxide properties. Ion implantation: theory and practice, annealing, gettering. Metallization: methods, problems, metallization failure.

Textbooks :

S.M. Sze, VLSI Technology, Ed. McGraw-Hill
J.W. Mayer and S.S. Lau, Electronic Materials Science: For Integrated Circuits in Si and GaAs, Ed. Macmillan Publishing Company.

Exam :

Written and oral examination

Tutorial Session :

Look up the interactive screen for student information at the Department main entrance